Optical Design Technology

     Micro/Nano Master
        Fabrication Technology
 
      A. E-beam Lithography
       B.
FIB Process
       C
. Holographic Lithography
       D
. Photolithogrphy
       
     Micro/Nano Mold
        
Fabrication Technology
       A. Metallic Mold Fabrication
          - Electroforming Process
       B.
Silicon/Glass Mold            Fabrication
          
- RIE Process
   

     Micro/Nano Molding        Technology
      A. Nano-imprinting Process
      B. Nano Releasing Technology
      C
. UV molding Process(I)
          
- Process

      D.
UV molding Process(II)
          
- Applications

      E.
Continuous UV-nano           Imprinting Technology
  
    G. Micro/Nano Hot-embossing
          Process


     Laser Interferometry
       Technology

 

 
Laser Interferometry Technology
 
▣ Advantages
    - Very high resolution
    - Non-contact and non-destructive measurement of any deformation
 
Measuring system
    - He-Ne Laser (λ: 632.8nm) / Shutter / Mirror / Beam Splitter / ND filter
      / Spatial Filter / Collimating lens

 
 


< Schematics of measuring system >


  Examples of calibration test
   - Out-of-plane deformation (75mm length cantilever)
               



       
                < Comparison of deflection theory with experimental results >


    - In-plane deformation (60mm length rubber plate)
                        
                      < Holographic Interferograms from 3 viewpoints >



           
                           < Comparison of FEA with experimental results >