∷ Optical Design Technology
    ∷ Micro/Nano Master
        Fabrication Technology
       A. E-beam Lithography
        B. Holographic Lithography
       C. Photolithogrphy
       
    ∷ Micro/Nano Mold
        Fabrication Technology
       A. Metallic Mold Fabrication
           - Electroforming Process
   
     ∷ Micro/Nano Molding        Technology
      A. Nano-imprinting Process
      B. Nano Releasing Technology
      C. UV molding Process(I)
          - Process
      D. Continuous UV-nano           Imprinting Technology


 

 

A. Nanoimprinting Lithography

Imprint Lithography is technique of transferring the image of nanostructures into a resist layer using pressure or UV light. This technology is proposed to fabricate extremely small pattern


▣ Advantages
    - No diffraction limit: Features as small as a few nanometers can been       fabricated.

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    - Broad range of materials can be used, including polymers, metals, and
      ceramics.
 No need for a specialized fabrication facility or clean room.

▣ Procedure
   1. Imprint step
    - Nano mold with nano-scale pattern is pressed into a resist

    2. Pattern transfer step
    Pattern transfer to substrate by RIE (Reactive Ion Etching)
     RIE is used to remove the residual resist in the compressed area