[ Research Areas ]

   ■ Nanoimprinting

   ■ Confocal Microscopy

   ■ Nano Functional Surfaces

   ■ Ultra Fast Maskless Nanolithography

   ■ Nano-Bio Sensors     

 

 

 

[ Research Capabilities ]

 

   ■   Optical Design Technology

     

   ■   Micro/Nano Master
          Fabrication Technology
        -
E-beam Lithography
        -
Holographic Lithography
        -
Photolithogrphy

    

   ■   Micro/Nano Mold
          Fabrication Technology
        -
Metallic Mold Fabrication

 

   ■  Micro/Nano Molding          Technology
        -
Nano-imprinting Process
        -
Nano Releasing Technology
        -
UV molding Process
        -
Roll Imprinting


 
A. Metallic Mold Fabrication - Electroforming Process

The process of replicating micro/nano patterns on a substrate to a metal stamper

▣ Advantages
    - Excellent mechanical properties
    - Possible to apply various micro/nano molding processes such as injection
      molding, hot-embossing, UV molding, etc.

▣ Procedure

▣ Electroforming system

▣ Fabricated nano stamper

    - Case 1: metallic nano stampers with pillar patterns

    - Case 2: metallic nano stampers with hole patterns

    - Case 3: metallic nano stampers with nano dot & hole array
 

                          
        <Diameter: 200nm, Pitch : 500nm> <Diameter: 200nm, Pitch : 500nm>

    - Case 4: metallic nano stampers with micro lens cavity

 

                           
        <Diameter: 200nm, Pitch : 500nm> <Diameter: 200nm, Pitch : 500nm>