∷ Optical Design Technology
    ∷ Micro/Nano Master
        Fabrication Technology
       A. E-beam Lithography
        B. Holographic Lithography
       C. Photolithogrphy
       
    ∷ Micro/Nano Mold
        Fabrication Technology
       A. Metallic Mold Fabrication
           - Electroforming Process
   
     ∷ Micro/Nano Molding        Technology
      A. Nano-imprinting Process
      B. Nano Releasing Technology
      C. UV molding Process(I)
          - Process
      D. Continuous UV-nano           Imprinting Technology
 

 
A. Metallic Mold Fabrication - Electroforming Process

The process of replicating micro/nano patterns on a substrate to a metal stamper

▣ Advantages
    - Excellent mechanical properties
    - Possible to apply various micro/nano molding processes such as injection
      molding, hot-embossing, UV molding, etc.

▣ Procedure

▣ Electroforming system

▣ Fabricated nano stamper
    - Case 1: metallic nano stampers with pillar patterns

    - Case 2: metallic nano stampers with hole patterns

    - Case 3: metallic nano stampers with nano dot & hole array
 

                          
        <Diameter: 200nm, Pitch : 500nm> <Diameter: 200nm, Pitch : 500nm>

    - Case 4: metallic nano stampers with micro lens cavity

 

                           
        <Diameter: 200nm, Pitch : 500nm> <Diameter: 200nm, Pitch : 500nm>