[ Research Areas ]

   ■ Nanoimprinting

   ■ Confocal Microscopy

   ■ Nano Functional Surfaces

   ■ Ultra Fast Maskless Nanolithography

   ■ Nano-Bio Sensors     

 

 

 

[ Research Capabilities ]

 

   ■   Optical Design Technology

     

   ■   Micro/Nano Master
          Fabrication Technology
        -
E-beam Lithography
        -
Holographic Lithography
        -
Photolithogrphy

    

   ■   Micro/Nano Mold
          Fabrication Technology
        -
Metallic Mold Fabrication

 

   ■  Micro/Nano Molding          Technology
        -
Nano-imprinting Process
        -
Nano Releasing Technology
        -
UV molding Process
        -
Roll Imprinting


 
C. Photolithography

The technology of transferring designed patterns on a mask to the photoresist on a substrate

▣ Advantages
    - Basic & conventional method : Can be applied various micro/nano patterning
       process
    - Verified method : high uniformity, reliability, repeatability

▣ Procedure
    
- PR(photo resist) coating -> Mask align -> UV exposure -> Development
       (Chemical reaction)